Compensation of operationally induced thermal deformations in the manufacturing process of an optical element under thermal control during operation
AssigneeCarl Zeiss SMT GmbH
InventorsJohannes SCHURER-KOCH, Maike LORENZ, Andre DIRAUF, Toralf GRUNER, Norman BAER
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Abstract
A method for producing an optical element (1) for an optical system, the optical element having a target surface shape (1a) and/or a target optical effect during the operation of the optical system. The optical element (1) has a mean operating temperature TX which during the operation of the optical system is controlled by at least one thermal manipulator (2). Also disclosed are an optical element for an optical system, and an optical system for a semiconductor technology apparatus.
Claims21
A method for producing an optical element for an optical system, the optical element having a target surface shape and/or a target optical effect during the operation of the optical system, wherein the optical element has a mean operating temperature which during the operation of the optical system is controlled by at least one thermal manipulator, the method comprising:
- determining an actual surface shape and/or the actual optical effect of the optical element at the mean operating temperature, with the actual surface shape and/or the actual optical effect of the optical element at the mean operating temperature deviating from the target surface shape and/or the target optical effect at the mean operating temperature, and
- machining the optical element to adapt the actual surface shape and/or the actual optical effect of the optical element to the target surface shape and/or the target optical effect at the mean operating temperature in accordance with the determined actual surface shape and/or the actual optical effect of the optical element at the mean operating temperature.
A method for producing an optical element for an optical system, the optical element having a target surface shape and/or a target optical effect during the operation of the optical system, wherein the optical element has a mean operating temperature which during the operation of the optical system is controlled by at least one thermal manipulator, the method comprising:
- determining the actual surface shape and/or the actual optical effect of the optical element at a manufacturing temperature,
- determining a change in the actual surface shape and/or in the actual optical effect of the optical element on account of a temperature difference between the manufacturing temperature and the mean operating temperature, and
- machining the optical element to adapt the actual surface shape and/or the actual optical effect of the optical element to the target surface shape and/or the target optical effect at the mean operating temperature in accordance with the determined actual surface shape and/or the actual optical effect at the manufacturing temperature and in accordance with the determined change in the actual surface shape and/or in the actual optical effect on account of the temperature difference between the mean operating temperature and the manufacturing temperature.
An optical element for an optical system, the optical element having a target surface shape and/or a target optical effect during the operation of the optical system, wherein the optical element has a first surface shape at a measurement temperature and has the target surface shape and/or the target optical effect at a mean operating temperature, with the optical element during the operation of the optical system having the mean operating temperature which is controlled by at least one thermal manipulator.
Dependencies are inferred from the claim text.