Coated substrate and method for producing coated substrate
AssigneeNiterra Co., Ltd.
InventorTomoki MURATA
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Abstract
A coated substrate in which a substrate is coated with a film, in which the thickness of the film is 60 nm or greater and 10 μm or less, measurement of the film shows that the percentage of C (carbon) element is 0.1 at % or greater and less than 10 at %, and the sum of the percentage of a metal element and the percentage of O (oxygen) element is 80 at % or greater, the relative density of the film is 90% or greater, and the film contains γ-Al2O3.
Claims6
A coated substrate in which a substrate is coated with a film, wherein
- the thickness of the film is 60 nm or greater and 10 μm or less,
- measurement of the film shows that the percentage of C (carbon) element is 0.1 at % or greater and less than 10 at %, and the sum of the percentage of a metal element and the percentage of O (oxygen) element is 80 at % or greater,
- the relative density of the film is 90% or greater, and
- the film contains γ-Al2O3.
A method for producing a coated substrate by using a bath liquid containing an organic solvent, wherein the water content of the bath liquid is less than 5 mass % and the bath liquid contains at least one or more types of metal elements and at least one or more types of halogen elements,
- a voltage is applied to a substrate, serving as a negative electrode, in a state in which the substrate is immersed in the bath liquid, thereby forming a film containing the metal element(s) on the substrate, and
- γ-Al2O3 is formed by heat treatment in a non-oxidizing atmosphere.
Dependencies are inferred from the claim text.