Inkjet printing apparatus, inkjet printing method, and electronic device

An inkjet printing method, the method comprising:

• providing an initial inkjet head comprising:
• a nozzle plate which has an inner side surface defining a nozzle part configured to eject an ink and comprises a first area, a second area, and a third area sequentially arranged in a direction away from the nozzle part with respect to the nozzle part;
• an organic layer on a lower surface of the nozzle plate in the second area and the third area, and spaced apart from the first area in a plan view;
• an inorganic layer on a lower surface of the organic layer in the third area and spaced apart from the first area and the second area in the plan view;
• and
• an initial liquid-repellent layer on a lower surface of the inorganic layer;
• removing the initial liquid-repellent layer;
• forming a first oxide layer covering the nozzle plate, the organic layer, and the inorganic layer on the lower surface of the nozzle plate in the first to third areas;
• forming a second oxide layer on a lower surface of the first oxide layer in the first to third areas;
• forming a liquid-repellent layer on a lower surface of the second oxide layer in the first to third areas, thereby forming an inkjet head comprising the nozzle plate, the organic layer, the inorganic layer, the first oxide layer, the second oxide layer, and the liquid-repellent layer;
• and
• ejecting the ink onto a substrate using the inkjet head.

An electronic device comprising:

• a display device comprising a substrate on which an ink ejected by an inkjet printing apparatus is applied;
• and
• a processor configured to transmit an image data signal and an input control signal to the display device,
• wherein the inkjet printing apparatus comprises:
• a stage on which the substrate is loaded;
• a nozzle plate having an inner side surface defining a nozzle part configured to eject the ink and a lower surface facing the stage, the nozzle plate comprising a first area, a second area, and a third area sequentially arranged in a direction away from the nozzle part with respect to the nozzle part;
• an organic layer on the lower surface of the nozzle plate in the second area and the third area, and spaced apart from the first area in a plan view;
• an inorganic layer on a lower surface of the organic layer in the third area and spaced apart from the first area and the second area in the plan view;
• a first oxide layer on the lower surface of the nozzle plate in the first to third areas and covering the nozzle plate, the organic layer, and the inorganic layer;
• a second oxide layer on a lower surface of the first oxide layer in the first to third areas;
• and
• a liquid-repellent layer on a lower surface of the second oxide layer in the first to third areas.