US 2026/0257371 A1 · PORTABLE ROBOT FOR SEMICONDUCTOR EQUIPMENT MAINTENANCE TASKS

Abstract

A robot arm assembly for use in a process module includes a base plate, a robot arm, a safety shield and a controller. The robot arm is disposed over the base plate and includes a plurality of components. The safety shield is defined to surround the base plate and the robot arm. The controller is disposed along a top surface on a lateral side of the safety shield and used to control operation of the robot arm and the plurality of components of the robot arm. The robot arm is configured to be mounted directly over a process module when a maintenance operation is to be performed at the process module.

Claims27

Dependent claims

A robot assembly for performing maintenance operations in a process module, comprising:

a base plate configured to mount to a mounting surface of the process module, a first end of the base plate having a mounting extension configured to secure the robot assembly to the mounting surface of the process module;
a robot arm coupled to the base plate via a first end of the robot arm, wherein the robot arm includes a plurality of motors, one or more linear actuators, and an end-effector;
a safety shield coupled to the first end of the base plate, the safety shield having sidewalls enclosing the robot arm and the base plate;
and
a controller coupled to the robot arm and the base plate, wherein the controller is configured to control the base plate, the plurality of motors, and the one or more linear actuators.

2 more elements

Dependencies are inferred from the claim text.

Portable robot for semiconductor equipment maintenance tasks

Life of this patent

Portable robot for semiconductor equipment maintenance tasks

Life of this patent

Abstract

Claims27