Substrate cleaning system
AssigneeKctech Co., Ltd.
InventorsGEUN SIK YUN, TAE HYUNG KIM
Life of this patent
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AssigneeKctech Co., Ltd.
InventorsGEUN SIK YUN, TAE HYUNG KIM
Estimating the term…
A substrate cleaning system includes a base, a plurality of support structures, a plurality of support frames including a frame body and a guide rail formed on the frame body in a height direction, a plurality of upper brackets, a plurality of lower brackets, an upper brush connected to the plurality of upper brackets to be rotatable about a first rotation axis parallel to the first axis, and configured to clean an upper surface of a substrate, a lower brush connected to the plurality of lower brackets to be rotatable about a second rotation axis parallel to the first axis, and configured to clean a lower surface of the substrate, a rotation actuator, an upper load cell, an upper stopper connected to a frame body of a support frame to position in a lower portion of the upper load cell, a lower load cell, and a hinge portion.
A substrate cleaning system comprising:
Dependencies are inferred from the claim text.