Temperature sensing of regions within a superconducting integrated circuit using in-situ resonators

A method for sensing an operating temperature of regions within a superconducting integrated circuit, wherein the superconducting integrated circuit comprises a first resonator having a first resonant frequency, wherein the first resonator has a first spatial location in relation to a floor plan of the superconducting integrated circuit, and a second resonator having a second resonant frequency, different from the first resonant frequency, wherein the second resonator has a second spatial location in relation to the floor plan of the superconducting integrated circuit, and wherein the second spatial location is different from the first spatial location, the method comprising:

• using a feed line, providing a test signal to each of the first resonator and the second resonator to elicit a frequency response from the first resonator or the second resonator;
• correlating the frequency response with a first region within the superconducting integrated circuit corresponding to the first spatial location associated with the first resonator or with a second region within the superconducting integrated circuit corresponding to the second spatial location associated with the second resonator;
• and
• analyzing any changes in the frequency response to determine whether the first region or the second region corresponds to a hotspot region.

A method for sensing an operating temperature of regions within a superconducting integrated circuit, wherein the superconducting integrated circuit comprises a first resonator having a first resonant frequency, wherein the first resonator has a first spatial location in relation to a floor plan of the superconducting integrated circuit, and a second resonator having a second resonant frequency, different from the first resonant frequency, wherein the second resonator has a second spatial location in relation to the floor plan of the superconducting integrated circuit, and wherein the second spatial location is different from the first spatial location, the method comprising:

• using a feed line, providing a test signal to each of the first resonator and the second resonator to elicit a frequency response from the first resonator or the second resonator, wherein the first inductive element comprises a first meandering inductor having a first length, wherein the second inductive element comprises a second meandering inductor having a second length, wherein the second length is selected to be different from the first length by an amount sufficient to ensure a detectable difference between the first resonant frequency and the second resonant frequency;
• correlating the frequency response with a first region within the superconducting integrated circuit corresponding to the first spatial location associated with the first resonator or with a second region within the superconducting integrated circuit corresponding to the second spatial location associated with the second resonator;
• and
• analyzing any changes in the frequency response to determine whether the first region or the second region corresponds to a hotspot region.

A method for sensing an operating temperature of regions within a superconducting integrated circuit, wherein the superconducting integrated circuit comprises a first resonator having a first resonant frequency, wherein the first resonator has a first spatial location in relation to a floor plan of the superconducting integrated circuit, and a second resonator having a second resonant frequency, different from the first resonant frequency, wherein the second resonator has a second spatial location in relation to the floor plan of the superconducting integrated circuit, and wherein the second spatial location is different from the first spatial location, the method comprising:

• using a feed line coupled to a microwave signal source, providing a test signal to each of the first resonator and the second resonator to elicit a frequency response from the first resonator or the second resonator, wherein the first inductive element has a first length, wherein the second inductive has a second length, wherein the second length is selected to be different from the first length by an amount sufficient to ensure a detectable difference between the first resonant frequency and the second resonant frequency;
• correlating the frequency response with a first region within the superconducting integrated circuit corresponding to the first spatial location associated with the first resonator or with a second region within the superconducting integrated circuit corresponding to the second spatial location associated with the second resonator;
• and
• analyzing any changes in the frequency response to determine whether the first region or the second region corresponds to a hotspot region.