Compositions, dielectric materials, electronic devices, and methods of forming the same

Abstract

A dielectric material is a thermoset polymer that is a copolymer of a first monomer and a second monomer. The first monomer can comprise a dipolar functional group having a dipole monomer of about 3.9 Debye or more. The first monomer can comprise a sulfur atom. The second monomer is a functionalized oligomeric silsesquioxane. The thermoset polymer can have a dielectric constant from about 15 to about 35 at 1000 Hertz. Methods can include disposing a precursor solution on a substrate. Methods can include heating the precursor solution to form a precursor layer. Methods can include disposing a photomask on a covered portion of the precursor layer and irradiating an exposed portion of the precursor layer to form the dielectric material. Methods can include removing the photomask and contacting the covered portion with a developing solution.

Dependencies are inferred from the claim text.