Elastic wave device, communication apparatus, and manufacturing method
AssigneeKYOCERA Corporation
InventorsYosuke NISHIOKA, Masaki NAMBU, Takashi KATO, Soichiro NOZOE
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Abstract
Since an IDT electrode is fine, power durability against migration needs to improve. An elastic wave device includes a piezoelectric-body layer, an electrode provided on the piezoelectric-body layer, and a cover covering at least a part of a side surface of the electrode and containing an element constituting the piezoelectric-body layer other than oxygen and nitrogen.
Claims19
An elastic wave device comprising:
- a piezoelectric-body layer;
- an electrode provided on the piezoelectric-body layer;
- and
- a cover covering at least a part of a side surface of the electrode and containing an element constituting the piezoelectric-body layer other than oxygen and nitrogen.
The elastic wave device according to claim 12, wherein the piezoelectric-body layer is made of lithium tantalate, and the cover contains tantalum oxide.
A manufacturing method comprising:
- forming a piezoelectric-body layer;
- forming an electrode on the piezoelectric-body layer;
- and
- performing dry etching on the piezoelectric-body layer and the electrode and causing a material separated from the piezoelectric-body layer by the dry etching to adhere to at least a part of a side surface of the electrode.
Dependencies are inferred from the claim text.