Thermally Stable Thin Film Resistor
AssigneeNational Sun Yat-Sen University
InventorYing-Chieh Lee
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Abstract
A thermally stable thin film resistor includes a substrate, a resistance layer and a functional layer. The resistance layer is stacked on the substrate. A material of the resistance layer has a positive temperature coefficient of resistance. The functional layer is stacked on a surface of the resistance layer opposite to the substrate. A material of the functional layer has a negative temperature coefficient of resistance. A difference between absolute values of the temperature coefficient of resistance of the material of the resistance layer and the material of the functional layer is less than or equal to 500 ppm/° C. A thickness ratio of the resistance layer to the functional layer is between 1:7 and 7:1.
Claims4
A thermally stable thin film resistor, comprising:
- a substrate;
- a resistance layer stacked on the substrate, wherein a material of the resistance layer has a positive temperature coefficient of resistance;
- and
- a functional layer stacked on a surface of the resistance layer opposite to the substrate, wherein a material of the functional layer has a negative temperature coefficient of resistance;
- wherein a difference between absolute values of the temperature coefficient of resistance of the material of the resistance layer and the material of the functional layer is less than or equal to 500 ppm/° C.;
- and
- wherein a thickness ratio of the resistance layer to the functional layer is between 1:7 and 7:1.
Dependencies are inferred from the claim text.