Back to results
US 2026/0251981 A1Published application
Spatial light modulation unit and exposure apparatus
AssigneeNikon Corporation
InventorsYasuhito KUBOTA, Yasushi MIZUNO, Masaki KATO, Masaki NISHIMURA, Hitoshi MIZUNO
Life of this patent
Estimating the term…
Abstract
A spatial light modulation unit is used in an exposure apparatus that exposes an exposure pattern onto a photosensitive substrate while moving the photosensitive substrate in a scan direction. The spatial light modulation unit includes: a spatial light modulator having a plurality of elements; a controller that controls the plurality of elements in accordance with the exposure pattern; and a SLM substrate on which the spatial light modulator and the controller are provided. The controller is arranged side by side in the scan direction with respect to the spatial light modulator.
Claims32
An exposure apparatus comprising:
- a first spatial light modulator including a plurality of first elements arrayed on a first surface;
- and
- a first illumination optical system including:
- a first optical component that guides light to the plurality of first elements at non-perpendicular angle to the first surface,
- wherein the first spatial light modulator and the first optical component are located at different positions with respect to a scan direction.
2 more elements
An exposure apparatus comprising:
- a first substrate on which a first spatial light modulator including a plurality of first mirrors arrayed in a first array direction on a first surface is mounted;
- a second substrate on which a second spatial light modulator including a plurality of second mirrors arrayed in a second array direction on a second surface is mounted;
- a first stage with a top surface capable of holding an object, the first stage being located under the first spatial light modulator and the second spatial light modulator and being movable relative to the first spatial light modulator and the second spatial light modulator in a first direction and in a second direction intersecting the first direction;
- a first illumination optical system including:
- a first lens, wherein light passing through the first lens travels in a direction intersecting the first surface;
- and
- a first mirror that guides light passing through the first lens to the plurality of first mirrors;
- and
- a second illumination optical system including:
- a second lens, wherein light passing through the second lens travels in a direction intersecting the second surface;
- and
- a second mirror guides light passing through the second lens to the plurality of second mirrors,
- wherein the top surface side of the first stage faces a first side of the first spatial light modulator and a first side of the second spatial light modulator, wherein the plurality of first mirrors are arrayed on first side of the first spatial light modulator, and the plurality of second mirrors are arrayed on the first side of the second spatial light modulator,
- wherein the first lens is located at a position lower than the first spatial light modulator,
- wherein the second lens is located at a position lower than the second spatial light modulator,
- wherein the first substrate and the second substrate are arranged in the second direction,
- wherein one of a long-side direction of the first substrate and a predetermined direction of the first substrate and one of a long-side direction of the second substrate and a predetermined direction of the second substrate are each oriented in the first direction or in a direction closer to the first direction than to the second direction,
- wherein a first electronic component and the first spatial light modulator are mounted on the first substrate so as to be arranged in the predetermined direction of the first substrate,
- wherein a second electronic component and the second spatial light modulator are mounted on the second substrate so as to be arranged in the predetermined direction of the second substrate,
- wherein the first spatial light modulator and the first lens are located at different positions with respect to the first direction, and
- wherein the second spatial light modulator and the second lens are located at different positions with respect to the first direction.
18 more elements
Dependencies are inferred from the claim text.