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US 2026/0251574 A1Published application
Sample measurement device and sample measurement method
AssigneeHamamatsu Photonics K.K.
InventorsKazuhiko FUJIWARA, Yoshihiro MARUYAMA
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Abstract
An irradiation unit scans an excitation light irradiation position along a line which does not pass through a same position a plurality of times in a measurement range on a sample over a period in which a measurement unit acquires one Raman spectrum. In the case in which a plurality of scanning lines are used, it is set such that each scanning line does not pass through the same position on the sample a plurality of times. It is set such that the plurality of scanning lines do not pass through the same position a plurality of times. Further, it is set such that a plurality of excitation light irradiation regions do not overlap each other.
Claims16
1:
- A sample measurement apparatus for analyzing a sample by using Raman spectroscopy, the sample measurement apparatus comprising:
- an irradiation unit configured to irradiate the sample with excitation light output from a light source;
- and
- a measurement unit configured to receive Raman scattered light generated in the sample in response to irradiation of the excitation light, and acquire a Raman spectrum, wherein
- the irradiation unit is configured to scan an excitation light irradiation position along a line which does not pass through a same position on the sample a plurality of times over a period in which the measurement unit acquires one Raman spectrum.
2 more elements
2:
- The sample measurement apparatus according to Claim 1, wherein the irradiation unit is configured to scan the excitation light irradiation position along the line having a straight line shape.
3:
- The sample measurement apparatus according to claim 1, wherein the irradiation unit is configured to scan the excitation light irradiation position along the line at a constant speed.
4:
- The sample measurement apparatus according to claim 1, wherein
- the irradiation unit is configured to scan the excitation light irradiation position along each of a plurality of lines, and each line does not pass through the same position on the sample a plurality of times, and
- the measurement unit is configured to acquire the one Raman spectrum for each of the plurality of lines.
5:
- The sample measurement apparatus according to claim 4, wherein the irradiation unit is configured to scan the excitation light irradiation position such that it does not pass through the same position on the sample in scanning of the excitation light irradiation position along the plurality of lines on the sample.
6:
- The sample measurement apparatus according to claim 5, wherein the irradiation unit is configured to scan the excitation light irradiation position such that excitation light irradiation regions on the sample in scanning of the excitation light irradiation position along the plurality of lines on the sample do not overlap each other.
7:
- The sample measurement apparatus according to claim 1, wherein the measurement unit is configured to perform standardization processing on the Raman spectrum, and perform analysis of the sample based on the Raman spectrum after the standardization processing.
8:
- The sample measurement apparatus according to claim 1, wherein the measurement unit is configured to extract a feature of the Raman spectrum, and perform analysis of the sample based on the feature.
9:
- A sample measurement method for analyzing a sample by using Raman spectroscopy, the sample measurement method comprising:
- an irradiation step of irradiating the sample with excitation light output from a light source;
- and
- a measurement step of receiving Raman scattered light generated in the sample in response to irradiation of the excitation light, and acquiring a Raman spectrum, wherein
- in the irradiation step, an excitation light irradiation position is scanned along a line which does not pass through a same position on the sample a plurality of times over a period in which one Raman spectrum is acquired in the measurement step.
2 more elements
10:
- The sample measurement method according to claim 9, wherein in the irradiation step, the excitation light irradiation position is scanned along the line having a straight line shape.
11:
- The sample measurement method according to claim 9, wherein in the irradiation step, the excitation light irradiation position is scanned along the line at a constant speed.
12:
- The sample measurement method according to claim 9, wherein
- in the irradiation step, the excitation light irradiation position is scanned along each of a plurality of lines, and each line does not pass through the same position on the sample a plurality of times, and
- in the measurement step, the one Raman spectrum is acquired for each of the plurality of lines.
13:
- The sample measurement method according to claim 12, wherein in the irradiation step, the excitation light irradiation position is scanned such that it does not pass through the same position on the sample in scanning of the excitation light irradiation position along the plurality of lines on the sample.
14:
- The sample measurement method according to claim 13, wherein in the irradiation step, the excitation light irradiation position is scanned such that excitation light irradiation regions on the sample in scanning of the excitation light irradiation position along the plurality of lines on the sample do not overlap each other.
15:
- The sample measurement method according to claim 9, wherein in the measurement step, standardization processing is performed on the Raman spectrum, and analysis of the sample is performed based on the Raman spectrum after the standardization processing.
16:
- The sample measurement method according to claim 9, wherein in the measurement step, a feature of the Raman spectrum is extracted, and analysis of the sample is performed based on the feature.