Detection device having photodetector array
AssigneeNational Taiwan University
InventorsChing-Fuh Lin, Yao-Han Dong
Life of this patent
Estimating the term…
Abstract
A detection device includes a photodetector array composed of photodetectors, each of which includes a semiconductor substrate, a metal layer in contact with the upper surface of the semiconductor, a first electrode in contact with the upper surface of the metal layer, and a second electrode in contact with the lower surface of the semiconductor substrate. A response signal of the photodetector includes a photoelectric response signal and/or a photothermal response signal. As the energy of light source is insufficient to cross the Schottky energy barrier of the photodetector, the photodetector is locally thermal heated to result in the photothermal response signal, which is converted into a square wave signal.
Claims20
A detection device for detecting a light, comprising:
- a photodetector array comprising a plurality of photodetectors, each of the plurality of photodetectors comprising:
- a semiconductor substrate;
- a metal layer, a lower surface of the metal layer forming a Schottky contact with an upper surface of the semiconductor substrate;
- a first electrode in contact with an upper surface of the metal layer;
- and
- a second electrode in ohmic contact with a lower surface of the semiconductor substrate;
- wherein the photodetector array converts the light into a response signal comprising a photoelectric response signal and/or a photothermal response signal, and the photodetector is locally heated to result in the photothermal response signal if energy of the light is insufficient to cross a Schottky barrier of the photodetector, and wherein the photodetector array further comprises a processor for converting the photothermal response signal into a square wave signal.
Dependencies are inferred from the claim text.