Method of carbon capture and recycling tetramethyl ammonium carbonate-containing solution
AssigneeUnited Microelectronics Corp.
InventorsKun-Ju Li, Chun-Tsen Lu, Yi-Wei Chen, Chih-Chieh Tsai, Po-Chun Chen, Tung-Chang Kuo, Kai-Lou Huang, Ju-Te Chen, Chiao-Yi Teng, Hsin-Yu Yen
Life of this patent
Estimating the term…