Coating apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYUJI YOSHIBA, KOUHEI NAGANO, HIROKI NAKANO, JUMPEI HAYASHI
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AssigneeCanon Kabushiki Kaisha
InventorsYUJI YOSHIBA, KOUHEI NAGANO, HIROKI NAKANO, JUMPEI HAYASHI
Estimating the term…
A coating apparatus for applying droplets to a substrate, includes a plurality of heads configured to discharge the droplets, a conveying mechanism configured to convey the plurality of heads in a first direction such that one head in the plurality of heads is arranged in a first region and another head in the plurality of heads is arranged in a second region, a moving mechanism configured to move one head in the plurality of heads between the first region and a coating region, and a scanning mechanism configured to scan the substrate in the first direction such that the droplets are applied to the substrate by the head arranged in the coating region in the plurality of heads, wherein at least a part of the second region is arranged above the scanning mechanism.
A coating apparatus for applying droplets to a substrate, comprising:
An article manufacturing method comprising:
Dependencies are inferred from the claim text.