Processing system and measurement system
AssigneeNikon Corporation
InventorsGo ICHINOSE, Shunta KUSU
Life of this patent
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AssigneeNikon Corporation
InventorsGo ICHINOSE, Shunta KUSU
Estimating the term…
A processing system includes: a processing apparatus configured to process an object by irradiating the object with a processing beam; a measuring apparatus configured to measure positions of the object and the processing apparatus; and a control apparatus configured to control the processing apparatus. The processing apparatus includes: a first movement apparatus configured to change a position of a processing head that emits the processing beam; and a second movement apparatus on which the first movement apparatus is mounted and which is configured to move together with the first movement apparatus. The control apparatus controls a movement due to the second movement apparatus based on a measuring result by the measurement apparatus and model information related to a shape of the object.
A processing system that processes an object, wherein
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A processing method that processes an object by using a processing apparatus that includes:
Dependencies are inferred from the claim text.