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US 2026/0249209 A1Published application
System to collect, recover and recycle chemical exhaust from semiconductor processing chambers
AssigneeApplied Materials, Inc.
InventorsAndrea Leoncini, Zhijie Chua
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Abstract
Chemical precursor recovery systems and methods of recovering and reusing semiconductor manufacturing chemistry are disclosed. The recovery systems include a cold trap inlet line in fluid communication with a plurality of cold traps and a cold trap outlet line. The plurality of cold traps is configured to condense the chemical precursors and are arranged based on semiconductor manufacturing process conditions.
Claims15
A chemical precursor recovery system comprising:
- a cold trap inlet line;
- a plurality of cold traps downstream of and in fluid communication with the cold trap inlet line, the plurality of cold traps configured to condense a chemical precursor;
- a cold trap outlet line downstream of and in fluid communication with the plurality of cold traps;
- and
- an activated charcoal filter downstream of the cold trap outlet line,
- wherein the plurality of cold traps are arranged in parallel with an inlet junction connected to and in fluid communication with the cold trap inlet line and an outlet junction connected to and in fluid communication with the outlet line.
3 more elements
A chemical precursor recovery system comprising:
- a cold trap inlet line;
- a plurality of cold traps downstream of and in fluid communication with the cold trap inlet line, the plurality of cold traps configured to condense a chemical precursor;
- a cold trap outlet line downstream of and in fluid communication with the plurality of cold traps;
- one or more gas separation module (GSM) downstream of and in fluid communication with the cold trap outlet line;
- and
- an activated charcoal filter downstream of the GSM.
3 more elements
Dependencies are inferred from the claim text.