Spectrally resolving semiconductor x-ray detector with lightemitting layer and method therefor
OwnerXiaochao XU, Matthew ANDREWinventors
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Abstract
A detection system comprises a semiconductor layer for converting x-ray photons or particles into charge carriers and a light emitting layer for generating light from the charge carriers. A computer system obtains images generated by the camera and tracks the response of the detector to x-ray photons and/or charged particles over time in order to spectrally resolve the energy of the x-ray photons or particles.
Claims14
A spectrally and spatially resolved x-ray and/or charged particle detection system, comprising:
- a detector comprising a semiconductor layer configured for converting photons or particles into charge carriers and a light emitting layer configured for generating light from the charge carriers;
- an optical microscope configured for reading out the detector;
- a camera coupled to the detector by the optical microscope;
- and
- a computer system that is configured to obtain images generated by the camera and to track the response of the detector to x-ray photons and/or charged particles.
A particle detection method, comprising:
- converting x-ray photons and/or charged particles into electron-hole pairs as charge carrier types in a semiconductor layer of a detector comprising the semiconductor layer configured for converting photons or particles into charge carriers;
- converting one of the charge carrier types into photons in a light emitting layer of the detector comprising the light emitting layer being configured for generating light from the charge carriers;
- reading out the photons from the detector with a camera coupled to the detector;
- and
- processing images generated by the camera and tracking the response of the detector to x-ray photons or charged particles to determine the position and the energy of the x-ray photons or charged particles.
A method for calibrating an x-ray photon or charged particle detection system, comprising:
- generating x-ray photons or charged particles of known energy;
- converting particles into electron-hole pairs as charge carrier types in a semiconductor layer of a detector comprising the semiconductor layer configured for converting photons or particles into charge carriers;
- converting one of the charge carrier types into photons in a light emitting layer of the detector comprising the light emitting layer being configured for generating light from the charge carriers;
- reading out the photons from the detector with a camera;
- and
- processing images generated by the camera and tracking spots generated by the x-ray photons or charged particles received by the detector and determining a relationship between the spots and the energy of the x-ray photons or charged particles.
Dependencies are inferred from the claim text.