Substrate processing and packaging
AssigneeTexas Instruments Incorporated
InventorsJane Qian Liu, Bradley Morgan Haskett
Life of this patent
Estimating the term…
Abstract
An example device includes a die including a digital micromirror device (DMD); a ceramic panel attached to the die, the ceramic panel having a first surface and a second surface; bond finger wells on respective first portions of the first surface; first scribe line wells on respective second portions of the first surface, the second portions being different than the first portions; second scribe line wells on respective portions of the second surface; first scribe lines, a respective one in each of the first scribe line wells; and second scribe lines, a respective one in each of the second scribe line wells.
Claims20
A device comprising:
- a die including a digital micromirror device (DMD);
- a ceramic panel attached to the die, the ceramic panel having a first surface and a second surface;
- bond finger wells on respective first portions of the first surface;
- first scribe line wells on respective second portions of the first surface, the second portions being different than the first portions;
- second scribe line wells on respective portions of the second surface;
- first scribe lines, a respective one in each of the first scribe line wells;
- and
- second scribe lines, a respective one in each of the second scribe line wells.
A device comprising:
- a die including a micromirror array;
- and
- a ceramic panel having an upper surface and a lower surface, the die being attached to a middle portion of the upper surface, wherein:
- the upper surface is characterized by a first scribe line well on a first side portion of the upper surface, a first bond finger well on the first side portion, a second scribe line well on a second side portion of the upper surface, and a second bond finger well on the second side portion, in which the middle portion is between the first and second side portions;
- and
- the lower surface is characterized by a third scribe line well on a first side portion of the lower surface, and a fourth scribe line well on a second side portion of the lower surface, the third scribe line well being aligned with the first scribe line well and the fourth scribe line well being aligned with the second scribe line well.
Dependencies are inferred from the claim text.