Method for processing plate substrate
AssigneeDenka Company Limited
InventorsShota YAMAMOTO, Takako TANIGAWA HOSHINO, Yusuke TAKAHASHI, Hiroyuki KURIMURA
Life of this patent
Estimating the term…
Loading patent…
AssigneeDenka Company Limited
InventorsShota YAMAMOTO, Takako TANIGAWA HOSHINO, Yusuke TAKAHASHI, Hiroyuki KURIMURA
Estimating the term…
A method for processing a plate substrate, including a step A of bonding a plate substrate (1) and an optically transparent plate substrate (2) through a temporary fixing composition, a step B of curing the composition to form an adhesive layer and bond the substrates (1) and (2) to each other, a step C of processing the substrate (1) or (2), and a step D of irradiating the adhesive layer with laser light from the substrate (2) side to decompose the adhesive layer and generate outgas, and peeling the substrates (1) and (2) from each other by the outgas, wherein in the step D: a part of the substrate (2) is linearly masked to form a linear region where the adhesive layer is not irradiated with the laser light, the linear region has a shape surrounding a part or an entirety of the adhesive layer.
A method for processing a plate substrate, the method comprising:
Dependencies are inferred from the claim text.