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US 2026/0247916 A1Published application
Electrostatic chuck film
AssigneeYoulchon Chemical Co., Ltd.
InventorsJi Moon LEE, Sang Gil DOH, Gyeong Seok YU, Kyu Wan LEE, Chang Woo LEE, Young Hun JANG, Han Bin CHO
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Abstract
The present disclosure relates to an electrostatic chuck film, and more particularly, to an electrostatic chuck film including an adhesive layer formed on a conductive layer and having electrical properties in a predetermined range and a thickness of each layer.
Claims8
An electrostatic chuck film comprising:
- a base layer;
- a conductive layer formed on the base layer;
- and
- an adhesive layer formed on the conductive layer.
1 more element
Dependencies are inferred from the claim text.