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AssigneeBeijing Naura Microelectronics Equipment Co., Ltd.
InventorsHaiyang ZHAO, Lulu CHEN
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A wafer position detection device and semiconductor equipment are disclosed. The device contains a linear sensor transmitter emitting a linear beam. The linear sensor transmitter slides on an annular sliding rail above the chamber and a linear sensor receiver slides on another annular sliding rail below the chamber. The orthogonal projection of the transmitter toward the wafer and an orthogonal projection of the receiver toward the wafer overlap partially on the wafer. A processor controls a driver to drive the linear sensor transmitter and receiver to slide synchronously along respective annular sliding rails, controls the linear sensor transmitter to emit detection signals and the linear sensor receiver to receive detection signals unobstructed by the wafer, and determines a center position of the wafer based on the detection signals received by the linear sensor receiver. The semiconductor chamber has windows transparent to the detection signals.
A wafer position detection device, applied to a semiconductor chamber, the wafer position detection device comprising:
A semiconductor equipment, comprising a semiconductor chamber, a wafer transfer device, and a wafer position detection device;
Dependencies are inferred from the claim text.