Substrate Processing Apparatus, Method of Detecting Tilt of Substrate Retainer, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

Abstract

It is possible to detect a tilt of a substrate retainer by a technique that includes: a rotator rotatably supporting a substrate retainer provided with support columns; a sensor attached to a transfer robot for transferring a substrate to the substrate retainer such that a distance between the sensor and the substrate retainer and a relative height of the sensor with respect to the substrate retainer are variable, and configured to detect the support columns within an optical path; and a controller capable of: (a) causing the rotator to rotate the substrate retainer such that the support columns intersect with the optical path; (b) calculating center positions of the substrate retainer from detection results of the sensor at a plurality of heights; and (c) determining whether a tilt of the substrate retainer is within a reference degree based on a difference in the center positions in a height direction.

Dependencies are inferred from the claim text.