Acoustic resonator and manufacturing method therefor

An acoustic wave resonator, comprising:

• a substrate, wherein a part of the substrate is released to form a cavity;
• a piezoelectric layer comprising a first portion disposed on the cavity and a second portion disposed on an unreleased part of the substrate, wherein the piezoelectric layer is configured to excite an acoustic wave under an action of a lateral electric field;
• a support anchor unit disposed between the first portion of the piezoelectric layer and the second portion of the piezoelectric layer, wherein the support anchor unit is configured to connect the first portion and the second portion;
• and
• a metal electrode layer formed on the piezoelectric layer, wherein the metal electrode layer comprises a metal electrode array formed by alternately arranging at least one pair of positive and negative metal electrodes, and the metal electrode array forms the lateral electric field,
• wherein the support anchor unit comprises at least one pair of support anchors respectively disposed on two sides of the first portion of the piezoelectric layer along an extending direction of a metal electrode of the at least one pair of metal electrodes.