Arc-resistant electrostatic chucks and arc-reducing plugs for electrostatic chucks

An arc-resistant electrostatic chuck, comprising:

• a baseplate including:
• a first gas supply hole to supply a heat transfer gas;
• and
• a first cavity arranged on a surface of the baseplate and in fluid communication with the first gas supply hole;
• a top ceramic layer arranged above the baseplate and including:
• a second cavity arranged on a first side of the top ceramic layer;
• an annular projection extending into the first cavity and defining a gas supply hole;
• a plenum arranged below the annular projection;
• and
• a third cavity arranged below the plenum;
• a bonding layer configured to bond the baseplate to the top ceramic layer and including a relief area adjacent to the first cavity;
• a first plug arranged in the first cavity of the baseplate;
• and
• a first multi-lumen plug arranged in the third cavity in the top ceramic layer and including N gas supply holes, wherein N is greater than 20.