Systems and Methods for Radiofrequency Signal Generator-Based Control of Impedance Matching System

A method comprising:

• receiving, via a network interface, a value of an indicator parameter indicative of an efficacy of transmission of radiofrequency power to a plasma processing system from an impedance matching system, the indicator parameter being a reflection parameter;
• identifying, using a processor, an adjustment of a gamma control capacitor within the impedance matching system to adjust the value of the indicator parameter with respect to a corresponding target value;
• and
• transmitting, using the processor, gamma control data to the impedance matching system, the gamma control data identifying the adjustment of the gamma control capacitor.

A plasma system comprising:

• an impedance matching system comprising a gamma control capacitor;
• a network interface configured to exchange data with the impedance matching system;
• a processor communicatively coupled to the impedance matching system via the network interface, the processor being configured to:
• receive a value of an indicator parameter indicative of an efficacy of transmission of radiofrequency power to a plasma processing system from the impedance matching system, the indicator parameter being a reflection parameter;
• identify an adjustment of the gamma control capacitor within the impedance matching system to adjust the value of the indicator parameter with respect to a corresponding target value;
• and
• transmit gamma control data to the impedance matching system, the gamma control data identifying the adjustment of the gamma control capacitor.