Detection apparatus, detection method, storage medium, lithography apparatus, and article manufacturing method

A detection method of detecting a position of a mark formed on a substrate, comprising:

• performing processing of detecting the position of the mark by template matching including calculation of a degree of correlation between an image of the mark and a template while changing a relative position between the image and the template,
• wherein in the performing the processing, a relative position to be set as a target of the calculation of the degree of correlation is determined based on a result of comparing, with a threshold, feature amounts of a plurality of pixels of the image corresponding to a plurality of feature points included in the template at each of a plurality of relative positions between the image and the template.

A computer-readable storage medium storing a program for causing a computer to execute a detection method of detecting a position of a mark formed on a substrate, the program causing the computer to execute:

• performing processing of detecting the position of the mark by template matching including calculation of a degree of correlation between an image of the mark and a template while changing a relative position between the image and the template,
• wherein in the performing the processing, a relative position to be set as a target of the calculation of the degree of correlation is determined based on a result of comparing, with a threshold, feature amounts of a plurality of pixels of the image corresponding to a plurality of feature points included in the template at each of a plurality of relative positions between the image and the template.