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US 2026/0244458 A1Published application
Substrate processing system
AssigneeEbara Corporation
InventorKento YOSHIDA
Life of this patent
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Abstract
A substrate processing system capable of reliably setting parameters without causing setting errors is disclosed. The substrate processing system comprises a communication network connected between a plurality of control devices and configured to transmit and receive parameters related to operating conditions of a device between the control devices.
Claims12
A substrate processing system comprising a plurality of substrate processing apparatuses,
- wherein each of the substrate processing apparatuses comprises:
- a control device;
- a device configured to operate a module or detect an operation of the module;
- and
- a fieldbus configured to electrically connect the control device and the device, and
- wherein the substrate processing system comprises a communication network connected between a plurality of control devices including the control device and configured to transmit and receive parameters related to operating conditions of the device between the control devices.
3 more elements
A substrate processing system comprising a substrate processing apparatus,
- wherein the substrate processing apparatus comprises:
- a control device;
- a device configured to operate a module or detect an operation of the module;
- and
- a fieldbus configured to electrically connect the control device and the device, and
- wherein the substrate processing system comprises:
- a data management device electrically connected to the control device;
- and
- a communication network configured to transmit and receive parameters related to operating conditions of the device between the control device and the data management device, and
- wherein the data management device is configured to changeable manage the parameters stored therein.
7 more elements
Dependencies are inferred from the claim text.