Measurement device, measurement apparatus, and measurement method

A measurement device that measures, with respect to a measurement axis direction, a thickness of a covering layer that is included in a measurement target object and that is formed on a top surface of a base material, the measurement device comprising:

• a first measurer which is provided with a first end portion having a first end surface as a first measurement reference position, and which electromagnetically measures a first distance between the first end surface and the top surface of the base material with respect to the measurement axis direction;
• a second measurer which is provided with a second end portion having a second end surface as a second measurement reference position, and which electromagnetically measures a second distance between the second end surface and the top surface of the base material with respect to the measurement axis direction;
• and
• a third measurer which is provided with a third end portion having a third end surface as a third measurement reference position, and which optically measures a third distance between the third end surface and a top surface of the covering layer with respect to the measurement axis direction, wherein
• in a direction perpendicular to the measurement axis direction, the first end portion, the second end portion, and the third end portion are arranged adjacent to each other.