Methods and mechanisms for using machine learning to generate diagnostic data for a particle event

A system, comprising:

• a memory device;
• and
• a processing device, operatively coupled to the memory device, to perform operations comprising:
• obtaining a set of manufacturing data associated with a particle event that occurred during a manufacturing process performed by a substrate processing system;
• providing, as input to each machine learning model of a plurality of machine learning models, a respective subset of data from the set of manufacturing data;
• obtaining, from each of the machine learning models, a respective output, wherein each output is indicative of diagnostic data associated with the particle event;
• and
• generating a diagnostic report based on the output data.

A non-transitory computer-readable storage medium comprising instructions that, when executed by a processing device operatively coupled to a memory, performs operations comprising:

• obtaining a set of manufacturing data associated with a particle event that occurred during a manufacturing process performed by a substrate processing system;
• providing, as input to each machine learning model of a plurality of machine learning models, a respective subset of data from the set of manufacturing data;
• obtaining, from each of the machine learning models, a respective output, wherein each output is indicative of diagnostic data associated with the particle event;
• and
• generating a diagnostic report based on the output data.