Process control system and method

A process control system that searches for an operating condition of a target process by a computer, the process control system comprising:

• a process model storage section that stores information on a process model that is a model for each of a plurality of processes with different characteristics and is a model that predicts a control value from a manipulation value to a corresponding one of the processes;
• a manufacturing performance database that stores manufacturing performance data on the processes;
• and
• an operating condition search section that identifies, based on the information on the process model, another process related to the target process, extracts manufacturing performance data in the another process identified, and searches for an operating condition of the target process on a basis of the manufacturing performance data extracted in the another process.

A process control method for searching for an operating condition of a target process by a computer, the process control method comprising:

• a step of acquiring, among information on a process model that is a model for each characteristic of the process and is a model that predicts a control value from a manipulation value to the process, information on the process model of the target process;
• a step of identifying, based on the information on the process model, a characteristic related to the target process and different from a characteristic of the model of the target,
• a step of extracting manufacturing performance data related to the characteristic identified, among manufacturing performance data on the process, and
• a step of searching for an operating condition of the target process on a basis of the manufacturing performance data extracted.