Measurement method for determining a replication parameter, and replication method using the determined replication parameter
OwnerMarkus GIEHL, Christian BLECHSCHMIDTinventors
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Abstract
A measurement method for determining at least one replication parameter for a replication method using at least one master element involves providing a master element comprising a reflection hologram, a light source, a detector, and a diffuser. The diffuser is positioned between the master element and the detector. The measurement method also involves irradiating the master element with light from the light source, sensing an intensity distribution of the light exiting the diffuser using the detector, and determining at least one replication parameter on the basis of the sensed intensity distribution.
Claims20
A measuring method for defining at least one replication parameter for a replication method using a master element,
- the measuring method comprising:
- providing a master element comprising a reflection hologram, a light source, a detector and a diffuser, the diffuser being present positioned between the master element and the detector,
- irradiating the master element with light from the light source
- capturing an intensity distribution of the light emerging from the diffuser with the detector, and
- defining at least one replication parameter on the basis of the captured intensity distribution.
Dependencies are inferred from the claim text.