A photolithography method and system
AssigneeIstanbul Medipol Universitesi
InventorsMuhammed Fatih TOY, Tolga GÜRCAN
Life of this patent
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Abstract
A photolithography method comprising the steps of: providing a target phase, transmitting a beam from an EM radiation source to a spatial light modulator and the beam reflected from the spatial light modulator to a sample, dividing a beam provided by a light source into two as an object wave and a reference wave and transmitting the object wave to the sample, merging and sending the object wave through the sample and the reference wave to an image receiving element and obtaining a phase image, comparing the phase image and the target phase and the quantizing the phase image to create a new image for the spatial light modulator, if a difference between the phase image and the target phase is above a predetermined value.
Claims15
A photolithography method comprising the steps of:
- providing a target phase;
- transmitting a beam from an EM radiation source to a spatial light modulator and the beam reflected from the spatial light modulator to a sample;
- dividing a beam provided by a light source into two as an object wave and a reference wave and transmitting the object wave to the sample;
- merging and sending the object wave went through the sample and the reference wave to an image receiving element and obtaining a phase image;
- and
- comparing the phase image and the target phase and the quantizing the phase image to create a new image for the spatial light modulator if a difference between the phase image and the target phase is above a predetermined value.
A photolithography system comprising:
- an EM radiation source and a spatial light modulator for receiving a beam from the EM radiation source and reflecting the received beam;
- a light source and a beam splitter for dividing a beam provided by the light source into two as an object wave and a reference wave which is transmitted the object wave to the sample;
- and
- a beam splitter for merging the object wave and the reference wave;
- an image receiving element for receiving the merged object wave and the reference wave;
- a processor unit having
- a memory element for storing a target phase and a phase image received by the image receiving element-;
- and
- a processing element is configured to determine the phase image and the target phase and to compare the phase image and the target phase a predetermined value and to quantize the difference for creating a new image and to send the new image to the spatial light modulator.
Dependencies are inferred from the claim text.