Resist composition, resist pattern formation method, compound and polymer compound
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsKaishi NARUSHIMA, Akiya FUJINO, Hiroki KATO
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsKaishi NARUSHIMA, Akiya FUJINO, Hiroki KATO
Estimating the term…
A resist composition that generates an acid upon exposure and whose solubility in a development solution changes under the action of the acid. The resist composition includes a resin component whose solubility in a development solution changes under the action of the acid, the resin component having a structural unit represented by the following General Formula (a0-1) in which L01 is a divalent linking group; L02 is a divalent linking group containing at least one of an ether bond, an amide bond and an ester bond; R01 is a hydrocarbon group which may have a substituent; Rf01 to Rf03 are each independently a hydrogen atom, a fluorine atom, or a fluorinated alkyl group; n0 is an integer of 0 to 5; m is an integer of 1 or more; and Mm+ is an m-valent cation
A resist composition that generates an acid upon exposure and whose solubility in a development solution changes under the action of the acid, comprising:
A compound represented by the following General Formula (m0-1):
Dependencies are inferred from the claim text.