Pressure sensing device
AssigneeInfineon Technologies Dresden GmbH
InventorsMarco Haubold, Mirko Vogt, Maik Stegemann, Marco Müller, Anita Föster, Anne Boitier-Mahlberg
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AssigneeInfineon Technologies Dresden GmbH
InventorsMarco Haubold, Mirko Vogt, Maik Stegemann, Marco Müller, Anita Föster, Anne Boitier-Mahlberg
Estimating the term…
In an embodiment a pressure sensing device includes a deflectable membrane structure configured to provide a deflection dependent output signal based on a pressure load and a mechanical abutment structure configured for adjusting a spring constant of the deflectable membrane structure depending on a deflection of the deflectable membrane structure, wherein the mechanical abutment structure is configured to provide an abutting condition of the deflectable membrane structure, when the deflection of the deflectable membrane structure exceeds a deflection threshold, and wherein the abutting condition results in a change from a first spring constant to an increased, second spring constant of the deflectable membrane structure.
A pressure sensing device comprising:
A pressure sensing device comprising:
Dependencies are inferred from the claim text.