Stacked sheet curved surface deforation measurement device and method thereof based on multi-contact micro-reflector

A stacked sheet curved surface deformation measurement device based on a multi-contact micro-reflector, the measurement device comprising a light source, an array mask, an optical splitter, a reflector, a multi-contact micro-reflector, and a camera, wherein:

• the optical splitter is disposed behind the light source, the array mask is disposed between the optical splitter and the light source, the reflector and the multi-contact micro-reflector are both disposed behind the optical splitter, and a stacked sheet to be measured is disposed behind the multi-contact micro-reflector;
• the array mask is configured to divide light emitted by the light source into a plurality of beams of parallel incident light according to a distribution of the array mask, and one beam of light is configured to detect a curved surface deformation of a single stacked sheet, a plurality of micro-reflectors are disposed at a front end of the multi-contact micro-reflector, a single micro-reflector extends between adjacent stacked sheets to be measured for detection during a measurement process, and intervals between the plurality of micro-reflectors are set up according to gaps between the adjacent stacked sheets in the stacked sheet to be measured;
• the light emitted by the light source is divided into several beams of parallel light by the array mask, and one of the beams of the parallel light is divided into two beams of light in different directions by the optical splitter, one beam enters the reflector to be reference light, and the other beam enters a micro-reflector of the multi-contact micro-reflector to be measurement light, the measurement light is reflected by the multi-contact micro-reflector, irradiates a surface of the stacked sheet to be measured, and is reflected by the stacked sheet to be measured, and the reflected light returns to the optical splitter along an original path, the reference light is reflected by the reflector and meanwhile enters the optical splitter, and the reference light and the measurement light are reflected by the optical splitter and enter the camera to merge to form an interference pattern.