Magnetic levitation propeller type of a gas injector and a photoresist removing processing chamber with the same

Abstract

Provided is a magnetic levitation propeller type of a gas Injector and a photo resist removing processing chamber with the same. The magnetic levitation propeller type of a gas injector includes: a plurality of rotating wings 112_1 to 112_K extending from a central shaft 111; a circular rotating ring magnetic unit 15 surrounding the plurality of the rotating wings 112_1 to 112_K; a first circular fixed ring magnetic unit 12 arranged so that at least a portion thereof faces the rotating ring magnetic unit 15 upward and downward; and a second circular fixed ring magnetic unit 13 arranged at a location symmetric to the first fixed ring magnetic unit 12 with respect to the rotating ring magnetic unit 15, wherein the plurality of rotating wings 112_1 to 112_K rotates between the first and second fixed ring magnetic units 12, 13 in a magnetically levitated state depending on a gas flow.

Dependencies are inferred from the claim text.