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US 2026/0242292 A1Published application
Ceramic, probe guide component, probe card, and package test socket
AssigneeFerrotec Corporation
InventorsWataru YAMAGISHI, Akira FUJITA, Kazumasa MORI, Shunichi ETO
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Abstract
A ceramic having a chemical composition containing, in terms of mass % on an oxide basis, 66.5% or more ZrO2, and one or more selected from Y2O3, CaO, MgO, CeO2, and HfO2, a total of which is 10 to 30%, wherein a crystal structure of the ZrO2 is cubic.
Claims19
A ceramic having a chemical composition containing,
- in terms of mass % on an oxide basis,
- 66.5% or more ZrO2, and
- one or more selected from Y2O3, CaO, MgO, CeO2, and HfO2, a total of which is 10 to 30%, wherein
- a crystal structure of the ZrO2 is cubic.
1 more element
Dependencies are inferred from the claim text.