Glass base material manufacturing device and method of manufacturing glass base material
AssigneeSumitomo Electric Industries, Ltd.
InventorsWataru Kikuchi, Shinji Ishikawa, Tatsuro Hasegawa
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AssigneeSumitomo Electric Industries, Ltd.
InventorsWataru Kikuchi, Shinji Ishikawa, Tatsuro Hasegawa
Estimating the term…
A glass base material manufacturing device includes: a heating furnace; a heater disposed inside the heating furnace; a furnace core tube disposed inside the heater and configured to accommodate a porous glass base material inside thereof; a top lid configured to close an upper opening of the furnace core tube; a vacuum pump configured to evacuate the inside of the furnace core tube and the heating furnace; a first pressure gauge configured to measure pressure inside the furnace core tube; a second pressure gauge configured to measure pressure inside the heating furnace but outside the furnace core tube; and a gas supply device configured to supply fluorine-compound-containing gas to the inside of the furnace core tube.
A glass base material manufacturing device comprising:
Dependencies are inferred from the claim text.