Vacuum chuck with bellow caps

A method comprising:

• providing a vacuum chuck, comprising:
• a chuck body having a planar surface and a plurality of apertures defined in the planar surface, wherein the planar surface is configured to support a workpiece;
• a plurality of bellows disposed within the plurality of apertures, wherein the plurality of bellows are compressible such that the plurality of bellows protrude from the planar surface in an uncompressed state and are recessed from the planar surface in a compressed state;
• a plurality of caps disposed on the plurality of bellows, wherein an opening is defined in a top surface of each cap, and the plurality of caps are substantially coplanar with the planar surface in the compressed state;
• and
• at least one vacuum source in fluid communication with the plurality of apertures of the chuck body and the opening of each cap;
• disposing the workpiece on the planar surface of the chuck body in contact with the plurality of caps;
• and
• controlling the at least one vacuum source to apply negative pressure to compress the plurality of bellows into the compressed state and flatten the workpiece onto the planar surface of the chuck body due to engagement with each cap.