Grinding apparatus, inclination adjusting method, and information display

An inclination adjusting method of adjusting a relative inclination between a holding surface of a substrate holder and a grinding surface of a grinding device in a grinding apparatus,

• wherein the grinding apparatus comprises:
• the substrate holder configured to hold a substrate on the holding surface thereof;
• the grinding device configured to grind the substrate, which is held by the substrate holder, with the grinding surface thereof;
• an inclination adjusting device configured to adjust the relative inclination between the holding surface and the grinding surface;
• and
• an information display configured to input and display information regarding shape correction of the substrate, and
• the inclination adjusting method comprises:
• inputting thickness information of the substrate before correction and correction pattern information into the information display;
• acquiring an expected grinding shape of the substrate ground by the grinding device based on the thickness information and the correction pattern information, and displaying the expected grinding shape in a display area of the information display;
• and
• determining validity of the displayed expected grinding shape, and adjusting the relative inclination between the holding surface and the grinding surface by the inclination adjusting device.