Structure and formation method of package with crack-stopping structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorShih-Yu LIAO
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorShih-Yu LIAO
Estimating the term…
A package structure and a method for forming a package structure are provided. The method includes receiving a first chip-containing structure and partially removing the first chip-containing structure to form an opening extending into the first chip-containing structure. The method also includes forming a crack-stopping structure in the opening and forming a dielectric bonding structure over the first chip-containing structure and the crack-stopping structure. The method further includes forming multiple metal bonding structures extending into the first chip-containing structure, and top surfaces of the metal bonding structures and the dielectric bonding structure are level. In addition, the method includes bonding a second chip structure to the dielectric bonding structure and the metal bonding structures through dielectric-to-dielectric bonding and metal-to-metal bonding.
A method for forming a package structure, comprising:
A method for forming a package structure, comprising:
A package structure, comprising:
Dependencies are inferred from the claim text.