Handling robot, transfer chamber, and semiconductor manufacturing apparatus

A handling robot which is provided in a transfer chamber of a semiconductor manufacturing apparatus comprising:

• a first arm and a second arm, each having a proximal end portion coupled to a drive mechanism;
• a first link having a proximal end portion rotatably connected to a distal end portion of the first arm;
• a second link having a proximal end portion rotatably connected to a distal end portion of the second arm;
• and
• a first holding finger for holding a workpiece,
• wherein each of a distal end portion of the first link and a distal end portion of the second link is rotatably connected to a proximal end portion of the first holding finger,
• the first link and the second link are disposed at height positions different from each other in a vertical direction,
• each of the first link and the second link has a shape including a portion curved in a direction opposite to a forward rotation direction for moving the first holding finger forward in plan view.
• a third link having a proximal end portion rotatably connected to the distal end portion of the first arm;
• a fourth link having a proximal end portion rotatably connected to the distal end portion of the second arm;
• and
• a second holding finger for holding a workpiece,
• wherein each of a distal end portion of the third link and a distal end portion of the fourth link is rotatably connected to a proximal end portion of the second holding finger,
• the third link and the fourth link are disposed at height positions different from each other in the vertical direction, and
• each of the third link and the fourth link has a shape including a portion curved in a direction opposite to a forward rotation direction for moving the second holding finger forward in plan view.