Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element comprising:

• a lower electrode;
• a piezoelectric layer having a perovskite structure that includes K and Na in an A-site and includes Nb in a B-site;
• an upper electrode;
• and
• a seed layer having a perovskite structure that includes a first element in an A-site and includes a second element in a B-site and configured to control an orientation of the piezoelectric layer, wherein
• the lower electrode, the seed layer, the piezoelectric layer, and the upper electrode are arranged in this order along a lamination direction,
• in the piezoelectric layer, N layers including a first layer to an N-th layer are laminated from bottom to top,
• in N−2 layers excluding the first layer and the N-th layer, the number of layers where a ratio of a first minimum value to a first upper end value is less than 90% is less than (N−2)/2,
• the first minimum value is a minimum value among intensities of the first element in the respective layers and the first upper end value is an intensity of the first element in an uppermost region of the respective layers when the piezoelectric layer is measured by SIMS along the lamination direction,
• in the N−2 layers excluding the first layer and the N-th layer, the number of layers where a ratio of a second minimum value to a second upper end value is less than 90% is (N−2)/2 or more, and
• the second minimum value is a minimum value among intensities of the second element in the respective layers and the second upper end value is an intensity of the second element in the uppermost region of the respective layers when the piezoelectric layer is measured by SIMS along the lamination direction.