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US 2026/0239750 A1Published application
Sensors including photodetectors with integrated temperature sensors
AssigneeGlobalFoundries U.S. Inc.
InventorsCHARLES PIKE, ANDREAS DANIEL STRICKER, ABDELSALAM ABOKETAF, HANYI DING
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Abstract
The embodiments herein relate to sensors including photodetectors with integrated temperature sensors. The sensor includes a substrate, a photodetector, and a temperature sensor. The substrate includes a device layer over a base substrate. The photodetector and the temperature sensor are in the device layer, and the temperature sensor is adjacent to the photodetector.
Claims20
A sensor for sensing illumination, comprising:
- a substrate including a device layer over a substrate;
- a photodetector in the device layer;
- and
- a temperature sensor in the device layer adjacent to the photodetector.
1 more element
A method of forming a sensor for sensing illumination, comprising:
- forming a photodetector in a device layer of a substrate, the substrate comprising a base substrate under the device layer;
- and
- forming a temperature sensor in the device layer adjacent to the photodetector.
Dependencies are inferred from the claim text.