Transistor substrate, electronic device including the same, and method of manufacturing the transistor substrate

An electronic device, comprising:

• a display device;
• a power supply which supplies power to the display device;
• and
• a processor which controls the display device,
• wherein the display device includes:
• a substrate;
• a first active pattern disposed on the substrate and including:
• a lower layer including an amorphous oxide semiconductor and having a first conductive region, a second conductive region, and a first channel region positioned between the first and second conductive regions;
• and
• an upper layer disposed on the lower layer and including a crystalline oxide semiconductor;
• a first gate electrode disposed on the first active pattern and overlapping the first channel region in a plan view,
• wherein the first gate electrode and the first active pattern form a first transistor;
• a first connecting electrode contacting the first conductive region;
• and
• a second connecting electrode contacting the second conductive region.

A method of manufacturing a transistor substrate, the method comprising:

• forming a first active pattern on a substrate, the first active pattern including a lower layer including an amorphous oxide semiconductor and having a first conductive region, a second conductive region, and a first channel region positioned between the first and second conductive regions and an upper layer on the lower layer, wherein the upper layer includes a crystalline oxide semiconductor;
• forming a first gate electrode on the first active pattern,
• wherein the first gate electrode overlaps the first channel region in a plan view, and the first gate electrode and the first active pattern form a first transistor;
• and
• forming a first connecting electrode contacting the first conductive region and a second connecting electrode contacting the second conductive region.