Microwave-reactive micro-heater, method for device transfer and bonding using the same, and apparatus therefor
AssigneeElectronics and Telecommunications Research Institute
InventorsJiho JOO, Jungho SHIN, Chanmi LEE, Gwang-Mun CHOI, Yong Sung EOM, Kwang-Seong CHOI, Jin Hyuk OH, Ki Seok JANG
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Abstract
A microwave-reactive micro-heater, fabricated from a material for generating heat in response to microwaves or electromagnetic waves, includes: an embossed structure formed on an upper surface of a planar substrate; a debossed structure formed within the embossed structure; and at least one of an adhesive material for temporarily fixing a device in the debossed structure and a through-hole for applying a vacuum.
Claims20
A microwave-reactive micro-heater, fabricated from a material for generating heat in response to microwaves or electromagnetic waves, the microwave-reactive micro-heater comprising:
- an embossed structure formed on an upper surface of a planar substrate;
- a debossed structure formed within the embossed structure;
- and
- at least one of an adhesive material for temporarily fixing a device in the debossed structure and a through-hole for applying a vacuum.
A device transfer and bonding method comprising:
- preparing a donor substrate on which a single device or a device array is arranged;
- aligning a microwave-reactive micro-heater over the donor substrate;
- lowering and pressing the aligned microwave-reactive micro-heater;
- picking up the device from the donor substrate to the microwave-reactive micro-heater by an adhesive force of an adhesive material or a vacuum suction force through a through-hole;
- aligning the microwave-reactive micro-heater, to which the device is temporarily bonded, over a target substrate;
- lowering and pressing the microwave-reactive micro-heater against a surface of the target substrate;
- generating microwaves or electromagnetic waves to heat the microwave-reactive micro-heater;
- bonding the device by an interconnection material between the device and the target substrate;
- and
- raising the microwave-reactive micro-heater to detach the microwave-reactive micro-heater from the device.
A device transfer and bonding apparatus comprising:
- a microwave-reactive micro-heater generating heat in response to microwaves or electromagnetic waves;
- a microwave generator generating the microwaves or the electromagnetic waves;
- a waveguide guiding the microwaves or the electromagnetic waves;
- a chamber confining the microwaves or the electromagnetic waves;
- a micro-heater fixing structure fixing the microwave-reactive micro-heater and applying pressure;
- and
- a stage fixing a donor substrate or a target substrate,
- wherein the micro-heater fixing structure and the stage are operable to move in x-y-z directions and a rotational direction to align the microwave-reactive micro-heater with a device.
Dependencies are inferred from the claim text.