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AssigneeZhejiang Normal University
InventorsCLARENCE AUGUSTINE TECK HUO TEE, BURHANUDDIN YEOP MAJLIS, WEY PING YEO, GANDI SUGANDI
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Disclosed is an electrodynamic micro-electromechanical system (MEMS) loudspeaker. The loudspeaker is provided with a pair of stators and a diaphragm placed between the stators. The loudspeaker generates an acoustic output according to an input electroacoustic signal. The movable part is related to performance of the electrodynamic MEMS loudspeaker, because it is a symmetrical structure of a film-conductor connector, and a rigid polyimide diaphragm is suspended on a diagonal spring structure and uniformly distributed on an elastic diaphragm. Further, this structure enables to optimize a frequency bandwidth, thereby achieving a larger bandwidth. A multi-turn planar micro-coil structure can be fabricated at a top and/or bottom of the diaphragm in a single-layer or double-layer form to enhance efficiency of the MEMS loudspeaker.
An electrodynamic micro-electromechanical system (MEMS) loudspeaker (1), wherein the MEMS loudspeaker (1) comprises at least two parts, and the two parts comprise at least a static part (2) and a movable part (3), wherein the static part (2) comprises a silicon framework (4) as a permanent magnet platform, at least an acoustic aperture (7), and a permanent magnet (6);
A device of an electrodynamic MEMS loudspeaker (1), wherein the MEMS loudspeaker (1) comprises a static part (2), a movable part (3) and an acoustic generation mechanism;
Dependencies are inferred from the claim text.