Resonator element and resonator device
AssigneeSeiko Epson Corporation
InventorsKazuyuki Nagata, Toshiya Usuda, Akira Mizuguchi
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AssigneeSeiko Epson Corporation
InventorsKazuyuki Nagata, Toshiya Usuda, Akira Mizuguchi
Estimating the term…
A resonator element includes: a vibration substrate including a support portion, and three or more vibrating arms extending from the support portion along a first direction and arranged side by side along a second direction orthogonal to the first direction; and driving portions each disposed so as to extend over the support portion and the corresponding vibrating arm and configured to expand and contract in the first direction to cause the corresponding vibrating arm to perform flexural vibration in a third direction orthogonal to the first direction and the second direction, and each driving portion is formed of a laminate including a first electrode, a piezoelectric layer, and a second electrode stacked in this order on the corresponding vibrating arm.
A resonator element comprising:
Dependencies are inferred from the claim text.