Piezoelectric acoustic lamb wave resonators having mass loading frames for spurious mode suppression
AssigneeMACOM Technology Solutions Holdings, Inc.
InventorRenyuan Wang
Life of this patent
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Abstract
An acoustic lamb wave resonator comprises a substrate having a recess, a piezoelectric layer that at least partially covers the recess, a plurality of metal electrodes on the piezoelectric layer, each metal electrode comprising a first metal, and a plurality of second metal segments that comprise a second metal that is different than the first metal, the second metal segments on respective ones of at least some of the metal electrodes opposite the piezoelectric layer.
Claims28
An acoustic lamb wave resonator, comprising:
- a substrate having a recess;
- a piezoelectric layer that at least partially covers the recess;
- a plurality of metal electrodes on the piezoelectric layer, each metal electrode comprising a first metal;
- and
- a plurality of second metal segments that comprise a second metal that is different than the first metal, the second metal segments on respective ones of at least some of the metal electrodes opposite the piezoelectric layer.
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12-13. (canceled)
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An acoustic lamb wave resonator, comprising:
- a substrate having a recess;
- a piezoelectric layer that at least partially covers the recess;
- a plurality of metal electrodes on the piezoelectric layer, the metal electrodes defining an active region;
- and
- a first metal frame section on a first side of the active region, the first metal frame section comprising a first plurality of spaced-apart frame segments on respective ones of the metal electrodes.
23-24. (canceled)
An acoustic lamb wave resonator, comprising:
- a substrate having a recess;
- a piezoelectric layer that at least partially covers the recess, where the piezoelectric layer includes an active region and an inactive region;
- and
- a plurality multi-layer metal structures on the piezoelectric layer in the active region, where each multi-layer metal structure includes a first layer that comprises a first metal that directly contacts the piezoelectric layer and a second layer that comprises a second metal that is different than the first metal on the first layer opposite the piezoelectric layer.
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Dependencies are inferred from the claim text.