Back to results
US 2026/0238181 A1Published application
Surface acoustic wave device with slit reflector
AssigneeSkyworks Solutions, Inc.
InventorsJun Sekimoto, Rei Goto
Life of this patent
Estimating the term…
Abstract
A surface acoustic wave device is disclosed. The surface acoustic wave device includes a multi-layer piezoelectric substrate including a support substrate and a piezoelectric layer, an interdigital transducer electrode in electrical communication with the piezoelectric layer, and a slit positioned in a wave propagation direction of the interdigital transducer electrode. The slit can have a depth extending at least partially through a thickness of the multi-layer piezoelectric substrate.
Claims20
A surface acoustic wave device comprising:
- a multi-layer piezoelectric substrate including a support substrate and a piezoelectric layer;
- an interdigital transducer electrode in electrical communication with the piezoelectric layer;
- and
- a slit positioned in a wave propagation direction of the interdigital transducer electrode, the slit having a depth extending at least partially through a thickness of the multi-layer piezoelectric substrate.
1 more element
A surface acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode in electrical communication with the piezoelectric layer;
- and
- a pair of slits including a first slit and a second slit positioned in a wave propagation direction of the interdigital transducer electrode, the interdigital transducer electrode is positioned between the pair of slits, the slit having a depth extending at least partially through a thickness of the piezoelectric layer.
1 more element
A surface acoustic wave device comprising:
- a multi-layer piezoelectric substrate including a support substrate and a piezoelectric layer;
- an interdigital transducer electrode in electrical communication with the piezoelectric layer;
- and
- a slit positioned in a wave propagation direction of the interdigital transducer electrode, the slit extending at least 0.25 L into the multi-layer piezoelectric substrate, L being a wavelength of a wave generated by the surface acoustic wave device.
1 more element
Dependencies are inferred from the claim text.